Metrology
Metrology
MarSurf UD 130 综合性轮廓和表面测量站
ZH

MarSurf UD 130
The MarSurf UD 130 closes the gap between the high-end solution MarSurf LD 130/LD 260 and the new standard combination measuring station MarSurf VD 140/280 with two probe systems.
The technical specifications of the MarSurf UD 130 are based on the interferometric probe system and the positioning speeds that reduce the measuring time for each workpiece.



  • 技术数据

测量速度(文本)
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
扫描长度末尾(X 方向)
130 mm
分辨率
2 nm
扫描长度开始(X 方向)
0.1 mm
定位速度(文本)
0.1 mm/s to 30 mm/s
输入
Standard probe LP-D 14-10-2/60°
测量范围 mm

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

轮廓分辨率
2 nm
扫描长度(文本)
0.1 mm to 130 mm
测量力 (N)
1 mN to 30 mN, software-adjustable